A whole scheme of a new kind of digital pattern generator of the e - beam lithography system is given , including system function , hardware and software design 本论文介绍了扫描电子束曝光机图形发生器的总体方案、系统设计、硬件实现和软件编程等,提出了一套完整的图形发生器硬件方案,并完成了图形发生器接口的设计。
This digital pattern generator composes of eight parts : interface circuit unit , dual - port sram unit , dsp unit , dac unit , expose / mark signal detection control unit , mark signal diction unit and final expose shape registers unit 本论文中的新型图形发生器由接口电路、双端口存储电路、数字信号处理电路、数模转换电路、曝光标记检测控制电路、标记检测电路、最终曝光数据寄存器单元和束闸控制电路构成。
A digital pattern generator is a piece of electronic test equipment or software used to generate digital electronics stimuli. Digital electronics stimuli are a specific kind of electrical waveform varying between two conventional voltages that correspond to two logic states (‘low state’ and ‘high state’, ‘0’ and ‘1’).